Effect of Wettability of Poly Silicon on CMP Behavior
- 著者名:
Young-Jae Kang Bong-Kyun Kang In-Kwon Kim Jin-Goo Park Yi-Koan Hong Sang-Yeob Han Seong-Kyu Yun Bo-Un Yoon Chang-Ki Hong - 掲載資料名:
- Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 991
- 発行年:
- 2007
- 開始ページ:
- 275
- 終了ページ:
- 282
- 総ページ数:
- 8
- 出版情報:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558999510 [1558999515]
- 言語:
- 英語
- 請求記号:
- M23500/991
- 資料種別:
- 国際会議録
類似資料:
Materials Research Society |
American Society of Mechanical Engineers |
Materials Research Society |
Electrochemical Society |
Materials Research Society |
Electrochemical Society |
Materials Research Society |
Electrochemical Society |
Electrochemical Society |
Plenum Press |
Materials Research Society |
12
国際会議録
The Surface Modification with Fluorocarbon Thin Films For the Prevention of Stiction in MEMS
MRS - Materials Research Society |