Shin, Y.E. ; Kim, Y.S. ; Kim, H.I. ; Kim, J.M. ; Chang, K.H. ; Parson, D.F.
出版情報:
New frontiers of processing and engineering in advanced materials : proceedings of the International Conference on New Frontiers of Process Scinence and Engineering in Advanced Materials : The 14th Iketani Conference, November, 24-26, 2004, held in Kyoto, Japan. pp.393-398, 2005. Zuerich, Switzerland. Trans Tech Publications
Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium. pp.114-120, 1999. Pennington, NJ. Electrochemical Society
Textures of materials : ICOTOM 13 : proceedings of the 13th International Conference on Textures of Materials, Seoul, Korea, August 26-30, 2002. pp.1747-1752, 2002. Uetikon-Zuerich, Switzerland. Trans Tech Publications
Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA. pp.180-187, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering