Grebs, T. ; Ridley, R. ; Chang, K. ; Wu, C.-T. ; Agarwal, R. ; Mytych, J. ; Dimachkie, W. ; Dolny, G. ; Michalowicz, J. ; Ruzyllo, J.
出版情報:
Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium. pp.108-115, 2003. Pennington, NJ. Electrochemical Society
Digital wireless communications IV : 1-2 April 2002, Orlando, USA. pp.207-218, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Shanmugasundaram, K. ; Chang, K. ; Shallenberger, J. ; Danel, A. ; Tardif, F. ; Ruzyllo, J.
出版情報:
Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium. pp.348-355, 2003. Pennington, NJ. Electrochemical Society
Chang, K. ; Shanmugasundaram, K. ; Lee, D.-O. ; Roman, P. ; Shallenberger, J. ; Chang, F.-M. ; Wang, J. ; Beck, R. ; Mumbauer, P. ; Grant, R. ; Ruzyllo, J.
出版情報:
Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium. pp.78-85, 2003. Pennington, NJ. Electrochemical Society
Chang, K. ; Thomas, S. G. ; Lee, T.-C. ; Gregory, R. B. ; O'Meara, D. ; Noering, K. ; Kirchgessner, J. ; Fresquet, G. ; Parker, J. ; Tillack, B.
出版情報:
Substrate engineering - paving the way to epitaxy : sympoisum held November 29-December 3, 1999, Boston, Massachusetts, U.S.A.. pp.O6.10.1-, 2000. Warrendale, Pa.. MRS-Materials Research Society
Staffa, J. ; Roman, P. ; Chang, K. ; Torek, K. ; Ruzyllo, J.
出版情報:
Environmental, safety, and health issues in IC production : symposium held December 4-5, 1996, Boston, Massachusetts, U.S.A.. pp.9-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Sensors, and command, control, communications, and intelligence (C31) technologies for homeland defense and law enforcement II : 21-25 April 2003, Orlando, Florida, USA. pp.421-432, 2003. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Chang, K. ; Shallenberger, J. ; Chang, F.-M. ; Shanmugasundaram, K. ; Roman, P. ; Mumbauer, P. ; Ruzyllo, J.
出版情報:
Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium. pp.404-410, 2005. Pennington, NJ. Electrochemical Society
Lu, C.J. ; Bendersky, L.A. ; Chang, K. ; Takeuchi, I.
出版情報:
Structure-property relationships of Oxide surfaces and interfaces II : symposium held December 2-3, 2002, Boston, Massachusetts, U.S.A.. pp.37-42, 2003. Warrendale, Pa.. Materials Research Society
国際会議録
