Chandross, M. ; Park, B. ; Stevens, M. ; Grest, G.S.
出版情報:
Materials science of microelectromechanical systems (MEMS) devices IV : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A.. pp.179-184, 2002. Warrendale, Pa.. Materials Research Society
Electrical, optical, and magnetic properties of organic solid state materials : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.. pp.787-, 1994. Pittsburgh, Pa.. MRS - Materials Research Society
Chandross, M. ; Grest, G.S. ; Stevens, M.J. ; Webb III, E.B.
出版情報:
Reliability, Testing, and Characterization of MEMS/MOEMS III. pp.207-214, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
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