Advanced signal processing algorithms, architectures, and implementations XII : 9-11 July 2002, Seattle, Washington, USA. pp.144-149, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Amorphous and nanocrystalline metals : symposium held December 1-4, 2003, Boston, Massachusetts, U.S.A.. pp.113-120, 2004. Warrendale. Materials Research Society
Quasicrystals 2003--preparation, properties and applications : symposium held December 1-3, 2003, Boston, Massachusetts, U.S.A.. pp.225-232, 2004. Warrendale, Pa.. Materials Research Society
Stirton, J.B. ; Miller, C.W. ; Viswanathan, A. ; Miyagi, M. ; Lane, L. ; Laughery, M.A. ; Parikh, T. ; Chan, K.C. ; Sezginer, A.
出版情報:
Process and Materials Characterization and Diagnostics in IC Manufacturing. pp.155-160, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Yu, J. ; Viswanathan, A. ; Miyagi, M. ; Uchida, J. ; Lane, L. ; Barry, K.A. ; Kajitani, M. ; Kikuchi, T. ; Chan, K.C. ; Stanke, F.E.
出版情報:
Metrology, Inspection, and Process Control for Microlithography XVIII. pp.839-848, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering