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A novel fabrication technology for anti-reflex water-level vacuum packaged microscanning mirrors

著者名:
  • M. Oldsen ( Fraunhofer Institute for Silicon Technology, Germany )
  • U. Hofmann ( Fraunhofer Institute for Silicon Technology, Germany )
  • H. J. Quenzer ( Fraunhofer Institute for Silicon Technology, Germany )
  • J. Janes ( Fraunhofer Institute for Silicon Technology, Germany )
  • C. Stolte ( Fraunhofer Institute for Silicon Technology, Germany )
掲載資料名:
Micromachining and microfabrication process technology XIII : 22-23 January 2008, San Jose, California, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6882
発行年:
2008
開始ページ:
688208-1
終了ページ:
688208-8
総ページ数:
8
出版情報:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819470577 [0819470570]
言語:
英語
請求記号:
P63600/6882
資料種別:
国際会議録

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