1.

国際会議録
国際会議録
1. Device-oriented directed self-assembly of Lamellar microdomains from a block copolymer containing hybrid
H.-C. Kim ; J. Cheng ; O.-H. Park ; S.-M. Park ; C. Rettner
出版情報: Emerging lithographic technologies XII.  2  pp.69212B-1-69212B-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 6921
2.

国際会議録
国際会議録
2. Self-aligned self-assembled organosilicate line patterns of ~20nm half-pitch from block-copolymer mediated self assembly
H. Kim ; J. Cheng ; C. Rettner ; O. Park ; R. Miller ; M. Hart ; L. Sundstrom ; Y. Zhang
出版情報: Advances in resist materials and processing technology XXIV.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 6519