1.

国際会議録
国際会議録
1. Chemical Mechanical Polishing of Epitaxial Germanium on SiO2-patterned Si(001) Substrates
J.M. Hydrick ; J. Park ; J. Bai ; C. Major ; M. Curtin
出版情報: SiGe, Ge, and Related Compounds 3: Materials, Processing, and Devices.  pp.237-248,  2008.  Pennington, NJ.  Electrochemical Society
シリーズ名: ECS transactions
シリーズ巻号: 16(10)
2.

国際会議録
国際会議録
2. Wide-spectral-range, Expanded-beam Spectroscopic Ellipsometer and its Application for Imaging/Mapping of Graded Nanocrystalline Si:H Films
A. Nemeth ; D. Attygalle ; L.R. Dahal ; P. Aryal ; Z. Huang ; C. Salupo ; P. Petrik ; G. Juhasz ; C. Major ; O. Polgar ; M. Fried ; B. Pecz ; R.W. Collins
出版情報: Amorphous and polycrystalline thin-film silicon science and technology--2011 : symposium held April 25-29, 2011, San Francisco, California, U.S.A..  pp.267-272,  2012.  Warrendale, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 1321
3.

国際会議録
国際会議録
3. Application of a Dual-spectral-range, Divergent-beam Spectroscopic Ellipsometer for High-speed Mapping of Large-area, Laterally-inhomogeneous, Photovoltaic Multilayers
M. Fried ; G. Juhasz ; C. Major ; A. Nemeth ; P. Petrik ; O. Polgar ; C. Salupo ; Lila R. Dahal ; R.W. Collins
出版情報: Advanced materials processing for scalable solar-cell manufacturing : symposium held April 25-29, 2011, San Francisco, California, U.S.A..  pp.157-162,  2012.  Warrendale, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 1323