Saleh, Hugo ; Law, Mark E. ; Bharatan, Sushil ; Jones, K. S. ; Krishnamoorthy, Wish ; Buyuklimanli, Temel
出版情報:
Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A.. pp.B6.7-, 2001. Warrendale, PA. Materials Research Society
Sahiner, M. Alper ; Ansari, Parviz ; Carroll, Malcolm S. ; King, C.A. ; Suh, Y.S. ; Levy, R.A. ; Buyuklimanli, Temel ; Croft, Mark
出版情報:
Semiconductor defect engineering - materials, synthetic structures and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.. pp.351-356, 2005. Warrendale, Pa.. Materials Research Society
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