Tamboli, D. ; Banerjee, G. ; Chang, S. ; Waddell, M. ; Butcher, I. ; Arefeen, Q. ; Hymes, S.
出版情報:
Thin film materials, processes, and reliability, plasma processing for the 100 nm node and copper interconnects with low-k inter-level dielectric films : proceedings of the international symposium. pp.291-303, 2003. Pennington, N.J.. Electrochemical Society
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