Zhang, F. ; Wake, R.W. ; Cook, L. ; Busnaina, A.A.
出版情報:
Proceedings of the Second International Symposium on Chemical Mechanical Planariarization [sic] in Integrated Circuit Device Manufacturing. pp.246-254, 1998. Pennington, N. J.. Electrochemical Society
Lee, J.M. ; Cho, S.H. ; Kim, T.H. ; Park, J.-G. ; Busnaina, A.A.
出版情報:
Fourth International Symposium on Laser Precision Microfabrication : 21-24 June, 2003, Munich, Germany. pp.441-444, 2003. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Chemical mechanical planariarization in IC device manufacturing III : proceedings of the international symposium. pp.468-476, 1999. Pennington, N. J.. Electrochemical Society
Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium. pp.312-320, 2003. Pennington, NJ. Electrochemical Society
Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium. pp.332-339, 2001. Pennington, N.J.. Electrochemical Society
Suni, I.I. ; Tiwari, C. ; Busnaina, A.A. ; Lin, H. ; Reynolds., H.V. ; Neely, C.
出版情報:
Copper Interconnects, New Contact Metallurgies/Structures, and Low-K Interlevel Dielectrics : proceedings of the International Symposium. pp.15-22, 2000. Pennington, N.J.. Electrochemical Society
国際会議録
テクニカルペーパー
