Whitfield, Jim D. ; Burnham, Marie E. ; Varker, Charles J. ; Wilson, Syd R.
出版情報:
Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A.. pp.241-248, 1987. Pittsburgh, Pa.. Materials Research Society
Burnham, Marie E. ; Legge, Ronald N. ; Nulman, Jaim ; Fejes, Peter L. ; Brown, James F.
出版情報:
Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A.. pp.115-120, 1987. Pittsburgh, Pa.. Materials Research Society
国際会議録
