1.

国際会議録
国際会議録
1. Comparison of at-wavelength inspection,printability,and simulation of nanometer-scale substrate defects in extreme ultraviolet lithography(EUVL)
Cardinale,G.F. ; Goldsmith,J.E.M. ; Ray-Chaudhuri,A.K. ; Fisher,A. ; Hector,S.D. ; Mangat,P.J.S. ; Masnyj,Z.S. ; Mancini,D.P. ; Wilkinson,B. ; Bokor,J. ; Jeong,S. ; Burkhart,S.C. ; Cerjan,C.J. ; Walton,C.C. ; Yan,P. ; Zhang,C.
出版情報: 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California.  Part1  pp.429-439,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3873
2.

国際会議録
国際会議録
2. Low-defect reflective mask blanks for extreme ultraviolet lithography
Burkhart,S.C. ; Cerjan,C.J. ; Kearney,P.A. ; Mirkarimi,P.B. ; Walton,C.C. ; Ray-Chaudhuri,A.K.
出版情報: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part2  pp.570-577,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3676
3.

国際会議録
国際会議録
3. Mask technology for EUV lithography
Bujak,M. ; Burkhart,S.C. ; Cerjan,C.J. ; Kearney,P.A. ; Moore,C.E. ; Prisbrey,S. ; Sweeney,D.W. ; Tong,W.M. ; Vernon,S.P. ; Walton,C.C. ; Warrick,A.L. ; Weber,F.J. ; Wedowski,M. ; Wilhelmsen,K.C. ; Jeong,S. ; Cardinale,G.F. ; Ray-Chaudhuri,A.K. ; Stivers,A.R. ; Tenjil,E.
出版情報: 15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98 : 16-17 November 1998, Munich-Unterhaching, Germany.  pp.30-39,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3665
4.

国際会議録
国際会議録
4. Extreme ultraviolet lithography:reflective mask technology
Walton,C.C. ; Kearney,P.A. ; Mirkarimi,P.B. ; Bowers,J.M. ; Cerjan,C.J. ; Warrick,A.L. ; Wilhelmsen,K.C. ; Fought,E.R. ; Moore,C.E. ; Larson,C. ; Baker,S.L. ; Burkhart,S.C. ; Hector,S.D.
出版情報: Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA.  pp.496-507,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3997
5.

国際会議録
国際会議録
5. Laser megajoule optical components damage threshold measurements with a large-size beamlet laser
Fornier,A. ; Feru,P. ; Pinot,B. ; Leplan,H. ; Leroux,G. ; Burkhart,S.C. ; Weiland,T.L.
出版情報: Laser-Induced Damage in Optical Materials: 1998.  pp.336-336,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3578
6.

国際会議録
国際会議録
6. Description and performance of the preamplifier for the National Ignition Facility(NIF)laser system
Crane,J.K. ; Martinez,M.D. ; Moran,B. ; Laumann,C.W. ; Davin,J.M. ; Beach,R.J. ; Golick,B. ; Jones,R. ; Braucht,J. ; Perry,M.D. ; Skulina,K.M. ; Penko,F.A. ; Herman,S.M. ; Burkhart,S.C.
出版情報: Solid State Lasers for Application to Inertial Confinement Fusion: Second Annual International Conference.  Part2  pp.601-609,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3047
7.

国際会議録
国際会議録
7. Amplitude and phase modulation with waveguide optics
Burkhart,S.C. ; Wilcox,R.B. ; Browning,D.F. ; Penko,F.A.
出版情報: Solid State Lasers for Application to Inertial Confinement Fusion: Second Annual International Conference.  Part2  pp.610-617,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3047
8.

国際会議録
国際会議録
8. High-fluence 1.05-um performance tests using 20-ns shaped pulses on the Beamlet prototype laser
Wonterghem,B.M.Van ; Murray,J.E. ; Burkhart,S.C. ; Penko,F.A. ; Henesian,M.A. ; Auerbach,J.M. ; Wegner,P.J. ; Caird,J.A.
出版情報: Solid State Lasers for Application to Inertial Confinement Fusion: Second Annual International Conference.  Part1  pp.66-72,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3047
9.

国際会議録
国際会議録
9. Frequency converter development for the National ignition Facility
Wegner,P.J. ; Auerbach,J.M. ; Barker,C.E. ; Burkhart,S.C. ; Couture,S.A. ; DeYoreo,J.J. ; Hibbard,R.L. ; Liou,L.W. ; Norton,M.A. ; Whitman,P.K. ; Hackel,L.A.
出版情報: Third International Conference on Solid State Lasers for Application to Inertial Confinement Fusion.  Part1  pp.392-405,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3492
10.

国際会議録
国際会議録
10. National Ignition Facility front-end laser system
Burkhart,S.C. ; Beach,R.J. ; Crane,J.K. ; Davin,J.M. ; Perry,M.D. ; Wilcox,R.B.
出版情報: Solid State Lasers for Application to Inertial Confinement Fusion (ICF).  pp.48-58,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 2633