Cirelli, R. A. ; Bude, J. ; Mansfield, W. M. ; Timp, G. L. ; Klemens, F. P. ; Watson, C. P. ; Weber, G. R. ; Sweeney, J R. ; Houlihan, F. M. ; Gabor, A. H. ; Baumann, F. ; Buonanno, M. ; Forsyth, G. F. ; Barr, D. ; Lee, T. C. ; Rafferty, C. S. ; Hutton, R. S. ; Timko, A. G. ; Hergenrother, J. ; Reichmanis, E. ; Harriott, L. R. ; Hillenius, S. J. ; Nalamasu, O.
出版情報:
Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California. pp.295-305, 1999. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Furtsch, M. ; Bevk, J. ; Bude, J. ; Downey, S. W. ; Krisch, K. S. ; Moriya, N. ; Silverman, P. J. ; Luftman, H. S.
出版情報:
Defect and impurity engineered semiconductors and devices : symposium held April 17-21, 1995, San Francisco, California, U.S.A.. pp.857-, 1995. Pittsburgh, PA. MRS - Materials Research Society
Timp, G. ; Baumann, F. ; Bude, J. ; Bourdelle, K.K. ; Green, M. ; Grazul, J. ; Chetti, A. ; Forsyth, G. ; Kleiman, R. ; Kiemens, F. ; Kornblit, A. ; Lyding, J. ; Mansfield, W. ; Muller, D. ; Sorsch, T. ; Tennant, D. ; Timp, W. ; Tung, R. ; Yu, J.
出版情報:
Quantum confinement VI: nanostructured materials and devices : proceedings of the international symposium. pp.55-69, 2001. Pennington, N.J.. Electrochemical Society
Alam, M.A. ; Weir, B. ; Silverman, P. ; Bude, J. ; Chetti, A. ; Ma, Y. ; Brown, M.M. ; Hwang, D. ; Hamad, A.
出版情報:
The physics and chemistry of SiO2 and the Si-SiO2 interface-4, 2000 : proceedings of the fourth International Symposium on the Physics and Chemistry of SiO2 and the Si-SiO2 Interface, Tronto, Canada, May 15-18, 2000. pp.365-376, 2000. Pennington, N.J.. Electrochemical Society
Ghetti, A. ; Alam, M.A. ; Bude, J. ; Sangiorgi, E. ; Timp, G. ; Weber, G.
出版情報:
The physics and chemistry of SiO2 and the Si-SiO2 interface-4, 2000 : proceedings of the fourth International Symposium on the Physics and Chemistry of SiO2 and the Si-SiO2 Interface, Tronto, Canada, May 15-18, 2000. pp.419-430, 2000. Pennington, N.J.. Electrochemical Society