Kuziak, R. ; Hartman, H. ; Budach, M. ; Kawalla, R.
出版情報:
Microalloying for new steel processes and applications : proceedings of the International Conference on Microalloying for New Steel Processes and Applications 7th-9th September 2005, Donostia-San Bebastián, Basque Country, Spain. pp.687-694, 2005. Zurich. Trans Tech Publications
Edinger, K. ; Boegli, V.A. ; Budach, M. ; Hoinkis, O. ; Weyrauch, B. ; Koops, H.W.P. ; Bihr, J. ; Greiser, J.
出版情報:
Photomask and Next-Generation Lithography Mask Technology X. pp.383-390, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Boegli, V.A. ; Koops, H.W.P. ; Budach, M. ; Edinger, K. ; Hoinkis, O. ; Weyrauch, B. ; Becker, R. ; Schmidt, R. ; Kaya, A. ; Reinhardt, A. ; Brauuer, C. ; Honold, H. ; Bihr, J. ; Greiser, J. ; Eisenmann, M.
出版情報:
22nd Annual BACUS Symposium on Photomask Technology. Part One pp.283-292, 2002. Bellingham, WA. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Liang, T. ; Stivers, A.R. ; Penn, M. ; Bald, D. ; Sethi, C. ; Boegli, V. ; Budach, M. ; Edinger, K. ; Spies, P.
出版情報:
Photomask and Next-Generation Lithography Mask Technology XI. pp.291-300, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Edinger, K. ; Becht, H. ; Becker, R. ; Bert, V. ; Boegli, V.A. ; Budach, M. ; Gyhde, S. ; Guyot, J. ; Hofmann, T. ; Hoinkis, O. ; Kaya, A. ; Koops, H.W. ; Spies, P. ; Weyrauch, B. ; Bihr, J.
出版情報:
23rd Annual BACUS Symposium on Photomask Technology. pp.1222-1231, 2003. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering