1.

国際会議録
国際会議録
1. Development and Implementation of an ISO Modeled Environmental, Health and Safety Management System
Brown, P.T. ; Mendicino, L. ; Nasi, T. ; McCay, T. ; Reblin, R.
出版情報: Environmental issues in the electronics and semiconductor industries : proceedings of the third international symposium.  pp.197-208,  2000.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 2000-7
2.

国際会議録
国際会議録
2. Continuous Real-Time Detection of Molecular Fluorine (F2) Emitted as a By-Product Of CVD and Etch Processes
Laush, C. ; Vartanian, V. ; Mendicino, L. ; Brown, P.T.
出版情報: Environmental issues in the electronics and semiconductor industries : proceedings of the third international symposium.  pp.72-81,  2000.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 2000-7
3.

国際会議録
国際会議録
3. Risk-Based Evaluation of Bulk Anhydrous Hydrogen Chloride Delivery Alternatives Used in the Semiconductor Industry
Nauert, C. ; Brown, P.T.
出版情報: Environmental issues in the electronics and semiconductor industries : proceedings of the third international symposium.  pp.160-173,  2000.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 2000-7
4.

国際会議録
国際会議録
4. Impact of Fluorine from NF3 Based Chamber Cleaning Processes
Brown, P.T. ; Mendicino, L. ; Vartanian, V.
出版情報: Environmental issues in the electronics and semiconductor industries : proceedings of the second international symposium.  pp.52-59,  1999.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 99-8
5.

国際会議録
国際会議録
5. An Analysis of Fluorinated Compound Emissions Reduction Technologies and Emission Reduction Goals
Beu, L. ; Brown, P.T.
出版情報: Environmental issues in the electronics and semiconductor industries : proceedings of the second international symposium.  pp.1-9,  1999.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 99-8
6.

国際会議録
国際会議録
6. Remote Plasma Clean Technology for Dielectric CVD Chamber Cleaning to Reduce PFC Emissions
Mendicino, L. ; Brown, P.T. ; Filipak, S. ; Loop, D. ; Basnett, R. ; Holber, W. ; Pearce, R. ; Johnson, A.
出版情報: Environmental issues in the electronics and semiconductor industries : proceedings of the second international symposium.  pp.40-51,  1999.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 99-8
7.

国際会議録
国際会議録
7. Copper Removal from Chemical Mechanical Polishing Effluent
Riley, C. ; Filson, J. ; Mendicino, L. ; Brown, P.T.
出版情報: Environmental issues in the electronics and semiconductor industries : proceedings of the third international symposium.  pp.174-184,  2000.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 2000-7
8.

国際会議録
国際会議録
8. Treatability of Chemical Mechanical Planarization (CMP) Wastewater
Brown, P.T. ; Davis, B.J. ; Sue, S.
出版情報: Environmental issues in the electronics and semiconductor industries : proceedings of the third international symposium.  pp.213-230,  2000.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 2000-7
9.

国際会議録
国際会議録
9. Air Monitoring and Odor Elimination in a Semiconductor Photolithography Area
Brown, P.T. ; Villars, M. ; Sevier, A. ; Kaczmarik, D. ; Mendicino, L.
出版情報: Environmental issues in the electronics and semiconductor industries : proceedings of the third international symposium.  pp.63-71,  2000.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 2000-7
10.

国際会議録
国際会議録
10. EHS Infrastructure Issues in Modern Wafer Fabs
Brown, P.T. ; Reblin, R. ; Heironimus, J. ; Nauert, C. ; Mendicino, L.
出版情報: Environmental Issues with Materials and Processes for the Electronics and Semiconductor Industries : proceedings of the fourth International Symposium.  pp.183-198,  2001.  Pennington, N.J..  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 2001-6