Brierley, Steven K. ; Kazior, Thomas E. ; Piekarski, Frank J.
出版情報:
Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A.. pp.451-456, 1991. Pittsburgh, Pa.. Materials Research Society
Brierley, Steven K. ; Kazior, Thomas E. ; Nguyen, Lan
出版情報:
Amorphous and crystalline insulating thin films--1996 : symposium held December 2-4, 1996, Boston, Massachusetts, U.S.A.. pp.121-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Hendriks, Henry T. ; Brierley, Steven K. ; Hoke, William E. ; Pan, Noren
出版情報:
Diagnostic techniques for semiconductor materials processing : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.. pp.211-, 1994. Pittsburgh. MRS - Materials Research Society
Amorphous and crystalline insulating thin films--1996 : symposium held December 2-4, 1996, Boston, Massachusetts, U.S.A.. pp.145-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society