1.

国際会議録
国際会議録
1. *LASER PROBES AND NUMERICAL MODELING AS PROCESS DIAGNOSTICS IN CHEMICAL VAPOR DEPOSITION
Breiland, William G. ; Ho, Pauline ; Coltrin, Michael E, ; Kee, Robert J. ; Evans, Greg H.
出版情報: Process diagnostics : materials, combustion, fusion : symposium held April 5-7, 1988, Reno, Nevada, U.S.A..  pp.23-34,  1988.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 117
2.

国際会議録
国際会議録
2. DIRECT MEASUREMENT OF THE REACTIVITY OF NH AND OH ON A SILICON NITRIDE SURFACE
Buss, R. J. ; Ho, P. ; Fisher, E. R. ; Breiland, William G.
出版情報: Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.51-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 334
3.

国際会議録
国際会議録
3. THEORETICAL ANALYSIS OF A ROTATING-DISK CHEMICAL VAPOR DEPOSITION REACTOR
Coltrin, Michael E. ; Breiland, William G. ; Evans, Gregory H. ; Kee, Robert J.
出版情報: AIChE SPRING MEETING, HOUSTON, TX - MARCH 29-APRIL 2, 1987.  1987.  New York.  American Institute of Chemical Engineers
シリーズ名: AIChE meeting [papers]
シリーズ巻号: 1987
4.

国際会議録
国際会議録
4. GAS-PHASE SILICON ATOM DENSITIES IN THE CHEMICAL VAPOR DEPOSITION OF SILICON FROM SILANE
Coltrin, Michael E. ; Breiland, William G. ; Ho, Pauline
出版情報: Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.3-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 334