Venkatasubramanian, R. ; Timmons, M. L. ; Bothra, S. ; Borrego, J. M.
出版情報:
Epitaxial heterostructures : symposium held April 16-19, 1990, San Francisco, California, U.S.A.. pp.253-258, 1990. Pittsburgh, Pa.. Materials Research Society
Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I and Interconnect and Contact Metallization: materials, processes, and reliability. pp.256-261, 1998. Pennington, N.J.. Electrochemical Society
Interconnect and contact metallization for ULSI : proceedings of the international symposium. pp.303-309, 1999. Pennington, N.J.. Electrochemical Society
Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I and Interconnect and Contact Metallization: materials, processes, and reliability. pp.178-184, 1998. Pennington, N.J.. Electrochemical Society
Bothra, S. ; Venkatasubramanian, R. ; Gandhi, S. K. ; Borrego, J. M.
出版情報:
Epitaxy of semiconductor layered structures : symposium held November 30-December 4, 1987, Boston, Massachusetts, U.S.A.. pp.183-186, 1988. Pittsburgh, Pa.. Materials Research Society
Sengupta, S. S. ; Baker, D. ; Sethi, S. ; Bothra, S.
出版情報:
Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.539-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Lin, X. W. ; Hui, K. ; Chanderhari, K. ; Bothra, S. ; Pramanik, D. ; Findley, P.
出版情報:
Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.399-, 1998. Warrendale, Pa.. MRS - Materials Research Society
ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology. pp.311-317, 1995. Pennington, NJ. Electrochemical Society