Hildenbrand, J. ; Woellenstein, J. ; Spiller, E. ; Kuehner, G. ; Boettner, H. ; Urban, G.A. ; Korvink, J.G.
出版情報:
Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France. pp.191-199, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Meincke, H. ; Ebling, D.G. ; Heinze, J. ; Tacke, M. ; Boettner, H.
出版情報:
Compound semiconductor power transistors and : State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXIX). pp.172-181, 1998. Pennington, N. J.. Electrochemical Society