Bodermann, B. ; Mirande, W. ; Kerwien, N. ; Tavrov, A. ; Totzeck, M. ; Tiziani, H.
出版情報:
Advanced characterization techniques for optics, semiconductors, and nanotechnologies : 3-5 August 2003, San Diego, California, USA. pp.320-330, 2003. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Arnz, M. ; Hasler-Grohne, W. ; Bodermann, B. ; Bosse, H.
出版情報:
EMLC 2006 : 22nd European Mask and Lithography Conference : 23-26 January 2006, Dresden, Germany. pp.62810C-, 2006. Bellingham, Wash.,. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Gans, F. ; Liebe, R. ; Heins, Th. ; Richter, J. ; Hasler-Grohne, W. ; Frase, G. C. ; Bodermann, B. ; Czerkas, S. ; Dirscherl, K. ; Bosse, H.
出版情報:
EMLC 2006 : 22nd European Mask and Lithography Conference : 23-26 January 2006, Dresden, Germany. pp.62810D-, 2006. Bellingham, Wash.,. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Gans, F. ; Liebe, R. ; Richter, J. ; Schatz, Th. ; Hauffe, B. ; Hillmann, F. ; Dobereiner, S. ; Bruck, H.-J. ; Scheuring, G. ; Brendel, B. ; Bettin, L. ; Roth, K.-D. ; Steinberg, W. ; Schluter, G. ; Speckbacher, P. ; Sedlmeier, W. ; Scherubl, T. ; HaBler-Grohne, W. ; Frase, C. G. ; Czerkas, S. ; Dirscherl, K. ; Bodermann, B. ; Mirande, W. ; Bosse, H.
出版情報:
EMLC 2005 : 21st European Mask and Lithography Conference : 31 January-3 February, 2005, Dresden, Germany. pp.122-133, 2005. Bellingham, Wash.,. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Mirande, W. ; Bodermann, B. ; Haβler-Grohne, W. ; Frase, C. G. ; Czerkas, S. ; Bosse, H.
出版情報:
20th European Conference on Mask Technology for Integrated Circuits and Microcomponents. pp.146-154, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Recent Developments in Traceable Dimensional Measurements II. pp.339-346, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Bodermann, B. ; Michaelis, W. ; Diener, A. ; Mirande, W.
出版情報:
19th European Conference on Mask Technology for Integrated Circuits and Microcomponents. pp.54-61, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
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