CRYSTALLINITY OF ISOLATED SILICON EPITAXY (ISE) SILICON-ON-INSULATOR LAYERS
- 著者名:
Allen, L. T. P. Zavrachy, P. M. Vu, D. P. Batty, M. W. Henderson, W. R. Boden T. J. Bowen, D. K. Gorden-Smith D. Thomas, C. R. Tjahjadi, T. - 掲載資料名:
- Chemistry and defects in semiconductor heterostructures
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 148
- 発行年:
- 1989
- 開始ページ:
- 409
- 終了ページ:
- 414
- 総ページ数:
- 6
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558990210 [1558990216]
- 言語:
- 英語
- 請求記号:
- M23500/148
- 資料種別:
- 国際会議録
類似資料:
1
国際会議録
Recent Advances in Fully-Scanned Active Matrix Displays Using Silicon-on-Insulator Technology
Electrochemical Society |
Noordhoff International Publishing |
2
国際会議録
DISTRIBUTION OF MISFIT DISLOCATIONS IN SiGe ON Si MEASURED WITH SYNCHROTRON-RADIATION TOPOGRAPHY
Materials Research Society |
Materials Research Society |
Materials Research Society |
SPIE - The International Society for Optical Engineering |
Materials Research Society |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
Materials Research Society |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |