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Automated defect cross-sectioning with an in-line DualBeam

著者名:
Blanc-Coquand, S. ( STMicroelectronics (France) )
Hinschberger, B. ( STMicroelectronics (France) )
Rouchouze, E. ( STMicroelectronics (France) )
Sicurani, E. ( CEA-LETI (France) )
Castagna, M. ( FEI Co. (USA) )
Weschler, M. ( FEI Co. (USA) )
Dworkin, L. ( FEI Co. (USA) )
Renard, D. ( FEI Co. (USA) )
Panyasak, A. ( FEI Co. (USA) )
さらに 4 件
掲載資料名:
Metrology, Inspection, and Process Control for Microlithography XVIII
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5375
発行年:
2004
開始ページ:
819
終了ページ:
826
総ページ数:
8
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452887 [0819452882]
言語:
英語
請求記号:
P63600/5375.2
資料種別:
国際会議録

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