Automated defect cross-sectioning with an in-line DualBeam
- 著者名:
Blanc-Coquand, S. ( STMicroelectronics (France) ) Hinschberger, B. ( STMicroelectronics (France) ) Rouchouze, E. ( STMicroelectronics (France) ) Sicurani, E. ( CEA-LETI (France) ) Castagna, M. ( FEI Co. (USA) ) Weschler, M. ( FEI Co. (USA) ) Dworkin, L. ( FEI Co. (USA) ) Renard, D. ( FEI Co. (USA) ) Panyasak, A. ( FEI Co. (USA) ) - 掲載資料名:
- Metrology, Inspection, and Process Control for Microlithography XVIII
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5375
- 発行年:
- 2004
- 開始ページ:
- 819
- 終了ページ:
- 826
- 総ページ数:
- 8
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452887 [0819452882]
- 言語:
- 英語
- 請求記号:
- P63600/5375.2
- 資料種別:
- 国際会議録
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