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シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
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出版情報:
Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.. pp.61-66, 1988. Pittsburgh, Pa.. Materials Research Society
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出版情報:
Proceedings of the Sixth International Symposium on Silicon-on-Insulator Technology and Devices. pp.50-56, 1994. Pennington, NJ. Electrochemical Society