1.

国際会議録
国際会議録
1. Ultrathin NO/N2O oxynitride dielectric for advanced flash memory application: Single wafer and batch technology
Zonca, R. ; Crivelli, B. ; Polignano, M. L. ; Cazzaniga, F. ; Alessandri, M. ; Caricato, A. P. ; Bersani, M. ; Sbetti, M. ; Vanzetti, L. ; Xing, G. C. ; Miner, G. E. ; Astici, N. ; Kuppurao, S. ; Lopes, D. ; Nesso, S.
出版情報: Structure and electronic properties of ultrathin dielectric films on silicon and related structures : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A..  pp.141-,  2000.  Warrendale, PA.  MRS-Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 592
2.

国際会議録
国際会議録
2. Characterization of nitrided silicon-silicon dioxide interfaces
Polignano, M. L. ; Alessandri, M. ; Brazzelli, D. ; Crivelli, B. ; Ghidini, G. ; Zonca, R. ; Caricato, A. P. ; Bersani, M. ; Sbetti, M. ; Vanzetti, L. ; Xing, G. C. ; Miner, G. E. ; Astici, N. ; Kuppurao, S. ; Lopes, D.
出版情報: Nondestructive methods for materials characterization : symposium held November 29-30, 1999, Boston, Massachusetts, U.S.A..  pp.207-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 591
3.

国際会議録
国際会議録
3. Quantitative Evaluation of Iron at the Silicon Surface after Wet Cleaning Treatments
Caputo, D. ; Bacciaglia, P. ; Carpanese, C. ; Polignano, M.L. ; Lazzeri, P. ; Bersani, M. ; Vanzetti, L. ; Pianetta, P. ; Moro, L.
出版情報: Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah.  pp.493-504,  2003.  Pennington, NJ.  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 5133
4.

国際会議録
国際会議録
4. Indium in Silicon: A Study on Diffusion and Electrical Activation
Scalese, S. ; Magna, A. La ; Mannino, G. ; Privitera, V. ; Bersani, M. ; Giubertoni, D. ; Solmi, S. ; Pichler, P.
出版情報: CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A..  pp.205-210,  2003.  Warrendale, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 765
5.

国際会議録
国際会議録
5. Characterization of a Thermal Oxidation Process on SiC Preamorphized by Ar Ion Implantation
Poggi, A. ; Nipoti, R. ; Solmi, S. ; Bersani, M. ; Vanzetti, L.
出版情報: Silicon carbide and related materials 2003 : ICSCRM, 2003 : proceedings of the 10th International Conference on Silicon Carbide and Related Materials 2003, Lyon, France, October 5-10, 2003.  pp.1357-1360,  2004.  Uetikon-Zuerich.  Trans Tech Publications
シリーズ名: Materials science forum
シリーズ巻号: 457-460
6.

国際会議録
国際会議録
6. Fabrication by rf-sputtering processing of Er3 + /Yb3 + -codoped silica-titania planar waveguides
Chiasera, A. ; Montagna, M. ; Tosello, C. ; Goncalves, R.R. ; Zampedri, L. ; Ferrari, M. ; Brenci, M. ; Pelli, S. ; Righini, G.C. ; Bersani, M. ; Lazzeri, P. ; Casa, P.D.
出版情報: Integrated Optical Devices: Fabrication and Testing.  pp.53-61,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4944