Neudeck, P.G. ; Powell, J.A. ; Trunek, A. ; Spry, D. ; Beheim, G.M. ; Benavage, E. ; Abel, P. ; Vetter, W.M. ; Dudley, M.
出版情報:
Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001. pp.251-254, 2002. Zuerich, Switzerland. Trans Tech Publications
Neudeck, P.G. ; Powell, J.A. ; Trunek, A. ; Spry, D. ; Beheim, G.M. ; Benavage, E. ; Abel, P. ; Vetter, W.M. ; Dudley, M.
出版情報:
Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001. pp.251-254, 2002. Zuerich, Switzerland. Trans Tech Publications