Chen, L. ; Kang, C.S. ; Oralkan, O. ; Dumin, D.J. ; Brown, G.A. ; Bellutti, P.
出版情報:
Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films. pp.88-98, 1997. Pennington, New Jersey. Electrochemical Society
Bellutti, P. ; Collini, A. ; Zorzi, N. ; Vaccari, G. ; Crippa, D.
出版情報:
Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.209-217, 1997. Pennington, NJ. Electrochemical Society
Bellutti, P. ; Collini, A. ; Ferrario, L. ; Zorzi, N ; Zen, M.
出版情報:
Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.204-208, 1997. Pennington, NJ. Electrochemical Society
Gaburro, Z. ; Pavesi, L. ; Pucker, G. ; Bellutti, P.
出版情報:
Microcrystalline and nanocrystalline semiconductors-2000 : symposium held November 27-30, 2000, Boston, Massachusetts, U.S.A.. 2001. Warrendale, PA.. Materials Research Society
Bellutti, P. ; Boscardin, M. ; Zen, M. ; Zorzi, N.
出版情報:
The physics and chemistry of SiO[2] and the Si-SiO[2] interface-3, 1996 : proceedings of the Third International Symposium on the Physics and Chemistry of SiO[2] and the Si-SiO[2] Interface. pp.635-644, 1996. Pennington, NJ. Electrochemical Society
Mezzetti, A. ; Pucker, G. ; Crivellari, M. ; Kompocholis, C. ; Bellutti, P. ; Lui, A. ; Daldosso, N. ; Riboli, F. ; Saiani, M. ; Gaburro, Z. ; Pavesi, L.
出版情報:
Optoelectronic Integration on Silicon. pp.158-163, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering