Ramm, Juergen ; Beck, Eugen ; Steiner, Franz-Peter ; Pixley, Ralph E. ; Eisele, Ignaz
出版情報:
Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A.. pp.249-254, 1992. Pittsburgh, Pa.. Materials Research Society