Microelectronic Device Technology : 1-2 October 1997, Austin, Texas. pp.342-353, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Microelectronic device technology II : 23-24 September, 1998, Santa Clara, California. pp.301-312, 1998. Bellingham, Washington. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering