Taylor, G. N. ; Trefonas, P. ; Szmanda, C. R. ; Barclay, G. G. ; Kavanagh, R. J. ; Blacksmith, R. F. ; Joesten, L. A. ; Monaghan, M. J. ; Coley, S. ; Mao, Z. ; Cameron, J. F. ; Hardy, R. ; Gronbeck, D. ; Connolly, S.
出版情報:
Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California. pp.174-185, 1999. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Materials science of high temperature polymers for microelectronics : symposium held April 29-May 2, 1991, Anaheim, California, U.S.A.. pp.281-292, 1991. Pittsburgh, Pa.. Materials Research Society
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