Stuckless, J. T. ; Starr, D. ; Bald, D. ; Campbell, Charles, T.
出版情報:
Structure and evolution of surfaces : symposium held December 2-5, 1996, Boston, Massachusette, U.S.A.. pp.103-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Cost and performance in integrated circuit creation : 27-28 February 2003, Santa Clara, California, USA. pp.114-122, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Liang, T. ; Stivers, A.R. ; Penn, M. ; Bald, D. ; Sethi, C. ; Boegli, V. ; Budach, M. ; Edinger, K. ; Spies, P.
出版情報:
Photomask and Next-Generation Lithography Mask Technology XI. pp.291-300, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
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