Scott, P. M. ; Babu, S. V. ; Partch, R. E. ; Matienzo, L. J.
出版情報:
Electronic packaging materials science III : symposium held November 30-December 4, 1987, Boston, Massachusetts, U.S.A.. pp.207-212, 1988. Pittsburgh, Pa.. Materials Research Society
Babu, S. V. ; Hariharaputhiran, M. ; Her, Y. S. ; Li, Y. ; Ramarajan, S.
出版情報:
Chemical mechanical polishing -- fundamentals and challenges : symposium held April 5-7, 1999, San Francisco, California, U.S.A.. pp.123-128, 2000. Warrendale, PA. Materials Research Society
Babu, S. V. ; Hariharaputhiran, M. ; Li, Y. ; Ramarajan, S.
出版情報:
Chemical mechanical polishing -- fundamentals and challenges : symposium held April 5-7, 1999, San Francisco, California, U.S.A.. pp.129-134, 2000. Warrendale, PA. Materials Research Society
Chemical mechanical polishing -- fundamentals and challenges : symposium held April 5-7, 1999, San Francisco, California, U.S.A.. pp.13-18, 2000. Warrendale, PA. Materials Research Society
Lu, J. ; Garland, J. E. ; Petite, C. M. ; Babu, S. V. ; Roy, D.
出版情報:
Chemical-mechanical planarization : symposium held April 22-24, 2003, San Francisco, California, U.S.A.. pp.257-262, 2003. Warrendale, Pa.. Materials Research Society
Chemical-mechanical planarization : symposium held April 22-24, 2003, San Francisco, California, U.S.A.. pp.279-284, 2003. Warrendale, Pa.. Materials Research Society
Chemical-mechanical planarization : symposium held April 22-24, 2003, San Francisco, California, U.S.A.. pp.167-172, 2003. Warrendale, Pa.. Materials Research Society
Hegde, Sharath ; Patri, Udaya B. ; Jindal, Anurag ; Babu, S. V.
出版情報:
Chemical-mechanical planarization : symposium held April 22-24, 2003, San Francisco, California, U.S.A.. pp.27-32, 2003. Warrendale, Pa.. Materials Research Society
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