B. Vincent ; J.-F. Damlencourt ; Y. Morand ; D. Rouchon ; M. Mermoux
出版情報:
Advanced gate stack, source/drain and channel engineering for Si-based CMOS 4 : new materials, processes and equipment. pp.235-242, 2008. Pennington, N.J.. Electrochemical Society
J. Damlencourt ; Y. Campidelli ; T. Nguyen ; B. Vincent ; C. Le Royer ; Y. Morand ; S. Cristoloveanu ; L. Clavelier
出版情報:
Advanced gate stack, source/drain and channel engineering for Si-based CMOS 3 : new materials, processes and equipment. pp.65-72, 2007. Pennington, NJ. Electrochemical Society
J. Damlencourt ; Y. Campidelli ; M. Roure ; B. Vincent ; E. Martinez ; F. Fillot ; B. Arrazat ; T. Nguyen ; S. Cristoloveanu ; L. Clavelier ; Y. Morand
出版情報:
Silicon-on-insulator technology and devices 13. pp.315-320, 2007. Pennington, N.J.. Electrochemical Society