Measuring 3D geometries of microstructures with the laser-scanning confocal vibrometer microscope
- 著者名:
- C. Rembe ( Polytec GmbH (Germany) )
- S. Boedecker ( Polytec GmbH (Germany) )
- B. Armbruster ( Polytec GmbH (Germany) )
- M. Bauer ( Polytec GmbH (Germany) )
- 掲載資料名:
- Optical Measurement Systems for Industrial Inspection V
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6616
- 発行年:
- 2007
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819467584 [0819467588]
- 言語:
- 英語
- 請求記号:
- P63600/6616
- 資料種別:
- 国際会議録
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