Arcot, B. ; Clevenger, L. A. ; Murarkar, S. P. ; Harper, J. M. E. ; Cabral Jr., C.
出版情報:
Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A.. pp.947-952, 1992. Pittsburgh, Pa.. Materials Research Society
Clevenger, L. A. ; Arcot, B. ; Ziegler, W. ; Colgan, E. G. ; Hong, Q. Z. ; d'Heurle, F. M. ; Cabral, C., Jr. ; Gallo, T. A. ; Harper, J. M. E.
出版情報:
Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A.. pp.133-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Harper, J. M. E. ; Clevenger, L. A. ; Colgan, E. G. ; Cabral, C., Jr. ; Arcot, B.
出版情報:
Interface control of electrical, chemical, and mechanical properties : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.. pp.307-, 1994. Pittsburgh. MRS - Materials Research Society
国際会議録
