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出版情報:
Low-dielectric constant materials IV : symposium held April 14-16, 1998, San Francisco, California, U.S.A.. pp.291-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Silicon carbide--materials, processing and devices : symposium held November 27-29, 2000, Boston, Massachusetts, U.S.A.. 2001. Warrendale, Pa.. Materials Research Society