Antonova, I.V. ; Misiuk, A. ; Popov, V.P. ; Plotnikov, A.E. ; Surma, B.
出版情報:
Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.98-106, 1997. Pennington, NJ. Electrochemical Society
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.64-69, 2003. Pennington, NJ. Electrochemical Society
Silicon-on-insulator technology and devices XII : proceedings of the international symposium. pp.137-142, 2005. Pennington, N.J.. Electrochemical Society
Silicon-on-insulator technology and devices XII : proceedings of the international symposium. pp.325-330, 2005. Pennington, N.J.. Electrochemical Society
Silicon-on-insulator technology and devices XI : proceedings of the international symposium. pp.505-510, 2003. Pennington, N.J.. Electrochemical Society
Science and technology of semiconductor-on-insulator structures and devices operating in a harsh environment. pp.215-220, 2005. Dordrecht. Kluwer Academic Publishers
シリーズ名:
NATO science series. Series 2, Mathematics, physics and chemistry