Christou, A. ; Papanicolaou, N.A. ; Anderson, G.W.
出版情報:
In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.371-376, 1990. Pittsburgh, Pa.. Materials Research Society
Proceedings of the Fourth International Symposium on Magnetic Materials, Processes, and Devices : applications to storage and microelectromechanical systems (MEMS). pp.637-646, 1995. Pennington, NJ. Electrochemical Society
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