Ammon, W.v. ; Ehlert, A. ; Lambert, U. ; Graef, D. ; Brohl, M. ; Wagner, P.
出版情報:
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.136-147, 1994. Pennington, NJ. Electrochemical Society
Huber, A. ; Kapser, M. ; Grabmeier, J. ; Lambert, U. ; Ammon, W.v. ; Pech, R.
出版情報:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.280-286, 2002. Pennington, NJ. Electrochemical Society
Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing. pp.36-50, 1993. Pennington, NJ. Electrochemical Society
Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing. pp.294-305, 1995. Pennington, NJ. Electrochemical Society