1.

国際会議録
国際会議録
1. Practical Metrology Aspects of Scanning Capacitance Microscopy for Silicon 2-D Dopant Profiling*
Kopanski,J.J. ; Marchiando,J.F. ; Alvis,R.
出版情報: Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.102-113,  1997.  Pennington, NJ.  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3322
2.

国際会議録
国際会議録
2. Online characterization of HSG polysilicon by AFM
Ge,L.M. ; el-Hamdi,M.A. ; Alvis,R. ; Sawaya,S. ; Gifford,D. ; Lainez,R. ; Hendrix,L.
出版情報: In-Line Methods and Monitors for Process and Yield Improvement.  pp.265-268,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3884