Harame, D. ; Subbanna, S. ; Dunn, J. ; St Onge, S.A. ; Freeman, G. ; Malinowski, J. ; Groves, R. ; Joseph, A. ; Ahlgren, D. ; Johnson, R. ; Zierak, M. ; Coolbaugh, D.
出版情報:
ULSI process integration : proceedings of the first international symposium. pp.143-146, 1999. Pennington, NJ. Electrochemical Society
Subbanna, S. ; Ahlgren, D. ; Harame, D. ; Meyerson, B.S.
出版情報:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.1406-1417, 1998. Pennington, NJ. Electrochemical Society
Freeman, G. ; Schonenberg, K. ; Ahlgren, D. ; Jeng, S-J. ; Nguyen-Ngoc, D. ; Stein, K. ; Colavito, D. ; Subbanna, S. ; Harame, D. ; Meyerson, B.
出版情報:
Epitaxy and applications of si-based heterostructures : symposium held April 13-17, 1998, San Francisco, California, U.S.A.. pp.19-, 1998. Warrendale, Pa.. MRS - Materials Research Society