1.

国際会議録
国際会議録
1. Characterization of Mechanical Properties of Thin Polymer Films Using Scanning Probe Microscopy
Xu, J. ; Hooker, J. ; Adhihetty, I. ; Padmanabhan, P. ; Chen, W.
出版情報: Fundamentals of nanoindentation and nanotribology : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.217-,  1998.  Warrendale, Penn..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 522
2.

国際会議録
国際会議録
2. Spectroscopic Ellipsometry as a Potential In-Line Optical Metrology Tool For Relative Porosity Measurements of Low- K Dielectric Films
Edwards, N.V. ; Vella, J. ; Xie, Q. ; Zollner, S. ; Werho, D. ; Adhihetty, I. ; Liu, R. ; Tiwald, T.E. ; Russell, C. ; Vires, J. ; Junker, K.H.
出版情報: Surface engineering 2001 - fundamentals and applications : symposium held November 26-29, 2001, Boston, Massachusetts, U.S.A..  pp.101-106,  2002.  Warrendale, Penn.  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 697