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Nanostructured Ti-B-C-N Thin Films Produced from Composite Targets Using Unbalanced Magnetron Sputtering

著者名:
D. Zhong ( Advanced Coatings & Surface Engineering Laboratory, Colorado School of Mines, Golden, CO )
I-W. Park ( Advanced Coatings & Surface Engineering Laboratory, Colorado School of Mines, Golden, CO )
A.O. Kunrath ( Advanced Coatings & Surface Engineering Laboratory, Colorado School of Mines, Golden, CO )
B. Mishra ( Advanced Coatings & Surface Engineering Laboratory, Colorado School of Mines, Golden, CO )
K.H. Kim ( School of Materials Science and Engineering, Pusan National University, Busan, South Korea )
A.A. Voevodin ( Air Force Research Laboratory, MLBT, Materials Directorate, Wright Patterson Air Force Base, OH )
E.A. Levashov ( Center for SHS, Moscow State Institute for Steels and Alloys, Moscow, Russia )
J.J. Moore ( Advanced Coatings & Surface Engineering Laboratory, Colorado School of Mines, Golden, CO )
さらに 3 件
掲載資料名:
48th annual technical conference proceedings, April 23-28, 2005, Denver, Colorado
シリーズ名:
Annual Technical Conference of Society of Vacuum Coaters
シリーズ巻号:
48
発行年:
2005
開始ページ:
547
終了ページ:
555
総ページ数:
9
出版情報:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
言語:
英語
請求記号:
A63930/48
資料種別:
国際会議録

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