Nanostructured Ti-B-C-N Thin Films Produced from Composite Targets Using Unbalanced Magnetron Sputtering
- 著者名:
D. Zhong ( Advanced Coatings & Surface Engineering Laboratory, Colorado School of Mines, Golden, CO ) I-W. Park ( Advanced Coatings & Surface Engineering Laboratory, Colorado School of Mines, Golden, CO ) A.O. Kunrath ( Advanced Coatings & Surface Engineering Laboratory, Colorado School of Mines, Golden, CO ) B. Mishra ( Advanced Coatings & Surface Engineering Laboratory, Colorado School of Mines, Golden, CO ) K.H. Kim ( School of Materials Science and Engineering, Pusan National University, Busan, South Korea ) A.A. Voevodin ( Air Force Research Laboratory, MLBT, Materials Directorate, Wright Patterson Air Force Base, OH ) E.A. Levashov ( Center for SHS, Moscow State Institute for Steels and Alloys, Moscow, Russia ) J.J. Moore ( Advanced Coatings & Surface Engineering Laboratory, Colorado School of Mines, Golden, CO ) - 掲載資料名:
- 48th annual technical conference proceedings, April 23-28, 2005, Denver, Colorado
- シリーズ名:
- Annual Technical Conference of Society of Vacuum Coaters
- シリーズ巻号:
- 48
- 発行年:
- 2005
- 開始ページ:
- 547
- 終了ページ:
- 555
- 総ページ数:
- 9
- 出版情報:
- Albuquerque, NM: Society of Vacuum Coaters
- ISSN:
- 07375921
- 言語:
- 英語
- 請求記号:
- A63930/48
- 資料種別:
- 国際会議録
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