1.

国際会議録
国際会議録
1. Line width roughness (LWR) performance of novel surface conditioner solutions for immersion lithography
B. J. Lu ; E. T. Liu ; A. Zeng ; A. Tseng ; S. Wu
出版情報: Advances in resist materials and processing technology XXV.  2  pp.69233G-1-69233G-9,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 6923
2.

国際会議録
国際会議録
2. Spatial phase-shifting lateral shearing interferometer
X. Guo ; A. Zeng ; H. Huang
出版情報: Optoelectronic measurement technology and applications : 2008 International Conference on Optical Instruments and Technology : 16-19 November 2008, Beijing, China.  pp.71602D-1-71602D-8,  2009.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 7160