Parl. H. R. ; Liu, J. Z. ; Maruyama, A. ; Wagner, S.
出版情報:
Amorphous silicon technology, 1989 : symposium held April 25-28, 1989, San Diego, California, U.S.A.. pp.613-620, 1989. Pittsburgh, Pa.. Materials Research Society
Maruyama, A. ; Shen, D.S. ; Chu, V. ; Liu, J.Z. ; Jaroker, J. ; Campbell, I. ; Fauchet, P.M. ; Wagner, S.
出版情報:
Chemical perspectives of microelectronic materials : symposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A.. pp.203-208, 1989. Pittsburgh, Pa.. Materials Research Society
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