1.

国際会議録
国際会議録
1. THE EFFECT OF DEPOSITION AND ANNEALING CONDITIONS ON THE MICROSTRUCTURE OF Al-Cu AND Al-Cu-Si THIN FILMS
Park, M. ; Krause, S. J. ; Wilson, S. R.
出版情報: Structure/property relationships for metal/metal interfaces : symposium held April 29-May 1, 1991, Anaheim, California, U.S.A..  pp.313-318,  1990.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 229
2.

国際会議録
国際会議録
2. TME EFFECTS OF Si ADDITION ON THE PROPERTIES OF AlCu FILMS USED IN MULTILEVEL METAL SYSTEMS
Wilson, S. R. ; Weston D. ; Kottke, M.
出版情報: Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A..  pp.545-548,  1990.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 181