Singh, R. ; Fakhruddin, M. ; Poole, K.F. ; Kondapi, S.V. ; Gupta, A. ; Narayan, J. ; Kar, S.
出版情報:
Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium. pp.79-93, 2003. Pennington, N.J.. Electrochemical Society