1.

国際会議録
国際会議録
1. *Pendeo-epitaxial growth and characterization of GaN and related materials on 6H-SiC(0001) and Si(111) substrates
Davis, R. F. ; Gehrke, T. ; Linthicum, K. J. ; Zheleva, T. S. ; Rajagopal, P. ; Zorman, C. A. ; Mehregany, M.
出版情報: GaN and related alloys - 1999 : symposium held November 28-December 3, 1999, Boston, Massachusetts, U.S.A..  pp.W2.1.1-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 595
2.

国際会議録
国際会議録
2. Deposition and characterization of in situ boron doped polycrystalline silicon films for microelectromechanical systems applications
McMahon, J. J. ; Melzak, J. M. ; Zorman, C. A. ; Chung, J. ; Mehregany, M.
出版情報: Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A..  pp.31-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 605
3.

国際会議録
国際会議録
3. Characterization of Polycrystalline SiC Grown on SiO2 and Si3N4 by APCVD for MEMS Applications
Wu, C. -H. ; Zorman, C. A. ; Mehregany, M.
出版情報: Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999.  pp.541-544,  2000.  Zuerich, Switzerland.  Trans Tech Publications
シリーズ名: Materials science forum
シリーズ巻号: 338-342(1)
4.

国際会議録
国際会議録
4. Bulk Micromachining of Polycrystalline SiC Using Si Molds Fabricated by Deep Reactive Ion Etching
Rajan, N. ; Zorman, C. A. ; Mehregany, M.
出版情報: Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999.  pp.1145-1148,  2000.  Zuerich, Switzerland.  Trans Tech Publications
シリーズ名: Materials science forum
シリーズ巻号: 338-342(2)
5.

国際会議録
国際会議録
5. Raman Spectroscopy on Biaxially Strained Epitaxial Layers of 3C-SiC on Si
Rohmfeld, S. ; Hundhausen, M. ; Ley, L. ; Zorman, C. A. ; Mehregany, M.
出版情報: Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999.  pp.595-598,  2000.  Zuerich, Switzerland.  Trans Tech Publications
シリーズ名: Materials science forum
シリーズ巻号: 338-342(1)
6.

国際会議録
国際会議録
6. Molding-based Thin Film Patterning Techniques for SiC Surface Micromachining
Song, X. ; Guo, S. ; Zorman, C. A. ; Wu, C. -H. ; Yasseen, A. A. ; Mehregany, M.
出版情報: Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999.  pp.1141-1144,  2000.  Zuerich, Switzerland.  Trans Tech Publications
シリーズ名: Materials science forum
シリーズ巻号: 338-342(2)
7.

国際会議録
国際会議録
7. Fabrication of Micro- and Nanoscale SiC Structures Using Selective Deposition Processes
Cheu, L. ; Fu, X. A. ; Zorman, C. A. ; Mehregany, M.
出版情報: Micro- and nanosystems : symposium held December 1-3, 2003, Boston, Massachusetts, U.S.A..  pp.37-42,  2004.  Warrendale, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 782