1.

国際会議録
国際会議録
1. Impact of Slurry Particle Aggregation upon Pad Surface Topography and Film Removal Rate in Chemical Mechanical Planarization
Zhong, L. ; Yang, J.
出版情報: Proceedings of the Second International Symposium on Chemical Mechanical Planariarization [sic] in Integrated Circuit Device Manufacturing.  pp.197-205,  1998.  Pennington, N. J..  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 98-7
2.

国際会議録
国際会議録
2. ULTRAVIOLET (UV) IRRADIATION EFFECT ON MINORITY-CARRIER RECOMBINATION LIFETIME IN SILICON WAFERS WITH OXIDE AND NITRIDE FILMS
Zhong, L. ; Shimura, F.
出版情報: Interface control of electrical, chemical, and mechanical properties : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A..  pp.471-,  1994.  Pittsburgh.  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 318